Sensor system including two inertial sensors

Fecha de publicación: 25/12/2014
Fuente: Wipo "Sensorization"
A sensor system is described as including at least two micromechanical inertial sensors, which are movably connected to a substrate, each inertial sensor including a functional layer, the functional layers of the two inertial sensors varying in thickness, and the two inertial sensors being situated next to one another on the substrate.