Fuente: Wipo "Sensorization" A sensor recess portion is provided on a sensor back surface. A membrane portion provided with a detection element forms a bottom surface of the sensor recess portion. A sensor support portion includes a back support portion, a support recess portion, a support hole, and a support recess inner wall surface. The back support portion covers an opening of the sensor recess portion. The support recess portion is provided on a side opposite from a physical quantity sensor. The support hole penetrates the back support portion and communicates with the opening. The support recess inner wall surface extends from the support recess bottom portion and is inclined with respect to a center line of the support hole.