COMPUTER SYSTEM, DIMENSION MEASUREMENT METHOD, AND STORAGE MEDIUM

Fecha de publicación: 22/12/2022
Fuente: WIPO (eseential oils OR extracts)
This invention reduces the time required for dimension measurement and eliminates operator-induced error. To that end, this invention provides a computer system that extracts, from image data for a semiconductor pattern, base point coordinate information for dimension measurement of an intended location on the semiconductor pattern and uses the base point coordinate information for dimension measurement, the computer system comprising a learning device equipped with an orientation estimation model that outputs coordinate information for at least two base points as a learned result, wherein the learning device is trained in advance using training data having semiconductor pattern image data as input and coordinate information for at least two base points as output and extracts coordinate information and a dimension for the at least two base points from new image data input into the learning device.