SYSTEM AND METHOD FOR MICRO-SCALE MACHINING

Fecha de publicación: 17/06/2021
Fuente: WIPO Wine
A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies. An apparatus for adjusting an operating parameter of a miniature electromechanical resonator comprises a vibration actuator/detector configured to measure the locations of the first and second principal stiffness axes, and a micro-machining apparatus to add or remove material from the resonator for adjusting the operating parameter thereof.